WaferMate 300 Product Description:

 

Title:

Ø  WaferMate 300 – Robotic Wafer Handling Automation Solutions

 

 

Product Description:

Ø  The WaferMate300 is a highly configurable, BOLTS-compatible robotic wafer-handling cell that mates high performance with cost competitiveness. As an ISO Class-2 clean FEOL EFEM, this platform includes all applicable mini-environment components, E84 compliance and rear hand-off.

 

 

Product Features:

 

Ø  Product Specifications: Pairs with all types of process tools and environments.

Ø  Super reliable, absolute encoder, 4-axis robots.

Ø  Can service up to 3 process tools.

Ø  300mm automation platform, adaptable for 200mm and smaller substrates.

Ø  Robots fitted with range of end effector technologies, including vacuum, Bernoulli non contact, edge grip and more.

Ø  Full safety guarding (OSHA and ANSI compliant).

 

 

Standard Accessories:

Ø  FOUP Opener

Ø  SMIF Pod Opener

Ø  Aligner

Ø  OCR

Ø  Barcode

Ø  Ionization Bars

Ø  Mini Environment

Ø  Wafer Flip Module

Ø  DEK Compatible Transfer Station

Ø  Wafer Conveyor / Oven Interface

Ø  SMEMA & SECS/GEM Interfaces

 

 

Machine Specifications:

 

Machine Footprint	991”W x 1041”L x 2063”T
Wafer Alignment	to ± .05º
Wafer Placement	±100µm
Clean Room Classification	Up to ISO Class 2 (Optional)
Wafer Interface Options - SMEMA                - Transfer Station - SECS/GEM            - Wafer Conveyor
Loadport Positions Available	1 or 2
MTBF	60,000 hours
Full SEMI Compliance
SEMI S2, S5, CE Compliant
Uptime	>97%
Handling Capabilities - Thin Wafers            - Bonded Wafers - Warped Wafers      - Perforated Wafers - Thick Wafers           - Trenched Wafers - Reticles - Glass Wafers

 

 

https://www.jabil.com/capabilities/precision-automation/resource-library.html